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C00330 - SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality Revision:SEMI C3.30-96 (Reapproved 0999) - Replaced the pressure will remain fairly

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Description

the pressure will remain fairly constant

instrument configuration

to image the sample topography

The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry

C00330 - SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality Revision:SEMI C3.30-96 (Reapproved 0999) - Replaced the pressure will remain fairlyNOTICE: This document was replaced by SEMI C58 in 2005. This standard is intended to establish the definitions, general procedures, specifications, and analytical procedures for hydrogen (H2), bulk, 99. 9997% quality. Where an analytical procedure different from that provided is substituted by a supplier or user, the burden of proof is on said supplier or user to confirm the equivalency. It should be noted that the following list of criteria was

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