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This specification was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee
one of the package types
Only the mechanical interface is specified
SEMI E84-0303 (technical revision)
M04500 - SEMI M45 - Specification for 300 mm Wafer Shipping System Revision:SEMI M45-1110 (Reapproved 0817) - Current This specification was technically approvedThis Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in August 2017; originally published March 2001; previously published November 2010. This Standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm
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