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SEMI E37-0222 (technical revision)
本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年9月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年10月にwww
To comply with this Specification
1 This Specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration
E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 StdPbc-1018 SEMI E37-0222 (technical revision)This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in April 2014; originally published March 2003; previously published March 2010. The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment