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such as pellets of perfluoroalkoxy (PFA)
SEMI F105-0914 (Reapproved 0922)
but the nature of the apparatus is significantly different to accommodate the bricks and ingots
신호 및 핀 할당 (¶ 6
G08400 - SEMI G84 - Specification for Strip Map Protocol StdTpc-3DS-IC such as pellets of perfluoroalkoxyThe purpose of this specification is to provide definition that will enable the implementation of strip mapping throughout the assembly and test process. This document will enable standardization of the strip map format and execution method throughout the factory floor. This document describes the format and methods in which strip map information shall be formatted and used to transfer information about a strip to and from equipment using the SECS GEM