C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality StdTpc-Silicon the pressure will remain fairly

the pressure will remain fairly constant

The user is referred to product labels

In the case of the guidelines

6-0701 (technical revision)

C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality StdTpc-Silicon the pressure will remain fairlyThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1995. NOTICE: This Document was balloted and approved for withdrawal in 2001. Trifluoromethane (CHF3) is a colorless, nonflammable, noncorrosive gas with a slight ethereal odor. It is shipped in cylinders as a liquefied gas under its own vapor pressure. Referenced SEMI Standards None.