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The scope of this Document covers grades of 1
or vacuum) utilizing a technique such as detecting light from a sample region of the environment’s space
The intent of this Standard is to facilitate the integration of ISEM equipment into an automated (semiconductor fabrication) factory
semiconductor fabrication and flat panel display) factory
F07800 - SEMI F78 - Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications StdPbc-1115 The scope of this Document1 Purpose 1. 1 The purpose of this Practice is to provide procedures for welding stainless steels and other corrosion resistant metals and alloys (CRAs) for fluid (liquid or gas) distribution systems in semiconductor manufacturing applications. Welds performed following these procedures are of sufficient quality to provide the required system purity, weld integrity, and weld strength for use in semiconductor manufacturing applications. 2 Scope 2. 1