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1 — Specification for SECS-II Support for Processing Management
This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the EtherCAT standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment
SEMI 3D11-1214 (first published)
E06800 - SEMI E68 - Test Method for Determining Warm-Up Time of Mass Flow Controllers StdPbc-0825 collection eventNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this method is to provide a standardized method for quantifying the warm up time of a mass flow controller (MFC). The test conditions in this method are intended to simulate bench top warm up, with an MFC