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This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22
This Specification describes equipment provided services to the factory that supports a high level of factory automation
It is a Guide for establishing optimum electrostatic compatibility of the handling environment for reticles and other items that are extremely electrostatic sensitive (EES) to electrostatic charge
The specification only describes information that is static in nature (i
D03600 - SEMI D36 - Terminology for LCD Backlight Unit Revision:SEMI D36-0306 - Inactive This edition was approved forThis Standard was technically approved by the Flat Panel Display Color Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29, 2005. Available at www. semi. org in March 2006; originally published November 2003. NOTICE: This Document was completely rewritten in 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current
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