C00340 - SEMI C3.40 - 四フッ化炭素（CF4），99.997%品質の仕様 StdPbc-0612 SEMI MF672 — Test Method

Name: C00340 - SEMI C3.40 - 四フッ化炭素（CF4），99.997%品質の仕様 StdPbc-0612 SEMI MF672 — Test Method
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Description

SEMI MF672 — Test Method for Measuring Resistivity Profile Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe

and unpolished wafers are not covered in these specifications but they may provide guidance in connection with their procurement

Current edition approved by the North American Regional Standards Committee on July 11

NF3である。

C00340 - SEMI C3.40 - 四フッ化炭素（CF4），99.997%品質の仕様 StdPbc-0612 SEMI MF672 — Test Methodglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org200010 (CF4) Referenced SEMI Standards None.

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