M05800 - SEMI M58 - Test Method for Evaluating DMA Based Particle Deposition Systems and Processes StdPbc-0819 SEMI C28 — Specifications for

SEMI C28 — Specifications for Hydrofluoric Acid

SEMI M62-0309 (technical revision)

SEMI F29-0997 (Reapproved 0517)

本書内で参照されている浸出テストとこれに関連する要求条件は，静的な状態での数値を提供する。

M05800 - SEMI M58 - Test Method for Evaluating DMA Based Particle Deposition Systems and Processes StdPbc-0819 SEMI C28 — Specifications for1 Purpose 1. 1 SEMI M52 requires the use of certified reference materials (CRMs) for calibration of scanning surface inspection systems (SSISs). The calibration method is defined in SEMI M53. This Test Method provides the procedure to determine whether a specific particle deposition system, using a differential mobility analyzer (DMA), can produce the required CRMs. 1. 2 Both organizations producing depositions internally for in house use and