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previously published in 1999
SEMI A1-1025 (technical revision)
critical pitting temperature) in addition to a qualitative (i
The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards
C00306 - SEMI C3.6 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality Revision:SEMI C3.6-0710 (Reapproved 0815) - Superseded previously published in 1999The purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry. This Document covers requirements for phosphine used in the semiconductor industry. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision History SEMI C3. 6 0421 (technical revision) SEMI C3. 6 0710 (Reapproved 0815) SEMI C3. 6 0710 (technical revision) SEMI C3. 6 0701 (technical revision) SEMI