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This Test Method defines the procedural guideline for measuring the surface hardness of a film and other components for Flat Panel Display (FPD) excluding glass
• Extension of recipe identification capability
SEMI C69-1224 (technical revision)
SEMI C40-0699 (first published)
C01000 - SEMI C10 - MDL（定量下限値）決定に関するガイド StdVol-Facilities This Test Method defines theNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Liquid Chemicals Global Technical Committee2014825global Audits and Reviews Subcommittee201411www. semiviews. orgwww. semi. org1998200911 SEMI (MDL: method detection limit) SEMIMDLSEMISEMI Referenced SEMI Standards SEMI C16 Guide for