P03000 - SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) Revision:SEMI P30-0997 (Reapproved 1104) - Inactive Important parameters

Important parameters

SEMI D20-93E (editorial revision)

材料の選択

SEMI E15 — Specification for Tool Load port

P03000 - SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) Revision:SEMI P30-0997 (Reapproved 1104) - Inactive Important parametersThis standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on July 23, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1997. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to