C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdTpc-Gases - Noble previously published November 2009

previously published November 2009

org in March 2003

shelf life is viewed from a quality point of view

SEMI C92-0216 (replaced by SEMI F119)

C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdTpc-Gases - Noble previously published November 2009NOTICE: This Document was reapproved with minor editorial changes. The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals