E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling StdPbc-1224 注意： 本文書は，SEMI E54一連のスタンダードとして出版されず，単独で発行および販売される。

注意： 本文書は，SEMI E54一連のスタンダードとして出版されず，単独で発行および販売される。

3-1016 (technical revision)

2-1016 (technical revision)

This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16

E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling StdPbc-1224 注意： 本文書は，SEMI E54一連のスタンダードとして出版されず，単独で発行および販売される。The purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and store 450 mm wafers, as specified by SEMI M74, within semiconductor device manufacturing facilities. This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers. This Document is intended to define a set of requirements to ensure