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E12000 - SEMI E120 - Specification for the Common Equipment Model (CEM) StdPbc-0616 NOTICE: This Document was balloted

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Description

NOTICE: This Document was balloted and approved for withdrawal in 2004

the Current version is the official and authoritative version

SEMI E125-0703 (first published)

FPDガラス基板をある枚数収納するカセットに適用される。選択された用語,定義並びに仕様概略が含まれている。枚葉用ガラス基板カセットの仕様は他文書で記述される予定である。

E12000 - SEMI E120 - Specification for the Common Equipment Model (CEM) StdPbc-0616 NOTICE: This Document was balloted* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1

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