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8 and SEMI E137
This guideline only defines the zones and volumes for them and the exact placement of them within these zone and volumes are at the direction of the load port suppliers
7-0304E (editorial revision)
SEMI MF1188 — Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption
M02900 - SEMI M29 - Specification for 300 mm Shipping Box Revision:SEMI M29-1296 (Reapproved 1103) - Superseded 8 and SEMI E137This specification was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on August 8, 2003. Initially available at www. semi. org September 2003; to be published November 2003. Originally published December 1996. This specification defines a container for safe transportation of 300 mm wafers from a