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E03501 - SEMI E35.1 - Guide for Cost of Equipment Ownership Comparison Metric StdPbc-0515 2-1108 — SECS-II Protocol for

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Description

2-1108 — SECS-II Protocol for Recipe and Parameter Management (RaP)

Single crystal (monocrystalline) silicon wafers are utilized for essentially all integrated circuits and many other semiconductor devices

This Document applies only to toxic gases delivered through specialty gas systems at pressures up to 8 × 105 Pa (8 atmospheres)

1  The measurement methods described herein can be applied to characterize the general electrostatic charge

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