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6-0710 (Reapproved 0815)
As low stiffness can occur with any material
SEMI F57 — Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
The scope of this Document covers grades of 1
C04500 - SEMI C45 - Specification and Guide for Tetraethylorthosilicate (TEOS) Revision:SEMI C45-0301 - Superseded 6-0710 (Reapproved 0815)This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in May 2018; originally published June 1999; previously published June 2009. The purpose of this Document is to standardize requirements for tetraethylorthosilicate used in the semiconductor industry