E14900 - SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment Revision:SEMI E149-0707 - Superseded 2 through SEMI E49

2 through SEMI E49

and to verify ongoing compliance as a part of factory maintenance procedures

本方法の目的は，クロム富化した不動態酸化層内で再現性のよい測定値を得るため，装置の一般的なパラメータおよび測定条件を記述することである。

This Standard accomplishes this by defining an operational model for prober equipment as viewed by a host

E14900 - SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment Revision:SEMI E149-0707 - Superseded 2 through SEMI E49NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: Paragraphs entitled NOTE: are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline. These have been supplied by the global